Maintaining consistent and precise temperature and humidity levels is essential in cleanrooms for several reasons:

• Product Yield and Quality: Improper temperature and humidity can negatively impact the manufacturing process of sensitive materials and products commonly found in cleanrooms. Delicate components used in electronics or pharmaceuticals can be damaged by fluctuations in temperature or excessive moisture. Inconsistent humidity can also lead to static discharge, which can damage sensitive electronic components.

• Process Control: Many cleanroom processes are highly sensitive to temperature and humidity variations. For example, in microchip fabrication, even slight temperature changes can cause dimensional variations in the circuits. Precise humidity control is also crucial for processes like photolithography, which uses light-sensitive materials.

• Worker Comfort and Safety: Extreme temperatures and humidity levels can create an uncomfortable work environment for cleanroom personnel. Discomfort can lead to fatigue, reduced concentration, and an increased risk of errors. Additionally, high humidity can promote the growth of mold and mildew, which can pose health risks.

ISO 14644 is the international standard that outlines the classification of cleanrooms based on airborne particle concentration. This standard provides recommended ranges for temperature and humidity for different cleanroom classifications. However, it’s important to remember that these are recommendations, and specific processes within a cleanroom may have even tighter requirements. Consulting the technical specifications for the products or processes being conducted in the cleanroom is vital to determine the most appropriate temperature and humidity levels.

Several factors come into play when selecting a monitoring system for your cleanroom:

• 正確さ： This is paramount. Your system needs to deliver highly accurate measurements of both temperature and humidity across the entire range required for your specific cleanroom environment.

• 応答時間： A fast response time ensures timely detection of any fluctuations in temperature or humidity. This allows for quick corrective actions to be taken before they can impact product yield or quality.

• Data Logging and Alerting: The ability to continuously log data and generate alerts when pre-defined thresholds are breached is crucial. This data can be used for trend analysis, ensuring consistent environmental conditions and identifying potential issues before they escalate.

• Sensor Suitability: Select sensors specifically designed for cleanroom environments. These sensors should be constructed from materials that are compatible with cleanroom cleaning protocols and not prone to particle shedding.

• Wireless vs. Wired Systems: Wireless systems offer greater flexibility in terms of placement, but wired systems may provide a more reliable connection and be less susceptible to interference. Consider your cleanroom layout and prioritize data security needs when making this choice.

• Scalability: If you anticipate expanding your cleanroom operations in the future, choose a monitoring system that can be easily scaled to accommodate additional sensors and data points.

• Strategic Sensor Placement: Place sensors in critical locations throughout the cleanroom, considering potential sources of temperature or humidity variations like air handling units, doorways, and equipment.

• Calibration and Maintenance: Regularly calibrate your sensors according to the manufacturer’s recommendations to ensure accuracy. Develop a preventative maintenance plan for your monitoring system to maintain optimal performance.

• Data Analysis and Review: Routinely analyze the data collected by your monitoring system. Look for trends, identify potential issues, and take corrective actions when necessary. Data analysis can also help you optimize your cleanroom environment for improved process control and product quality.

• Documentation and Record Keeping: Maintain detailed records of calibration certificates, maintenance logs, and sensor data. This documentation is essential for regulatory compliance and helps demonstrate your commitment to maintaining a controlled environment.